Capacitive displacement sensor Vacuum compatible high precision position sensor
Japan Laser Co., Ltd.
About This Product
Probe compatible with high vacuum and ultra-high vacuum. Low outgas, high stability, and non-magnetic properties available.
■Features
・Position measurement range (linear): 10μm to 4mm
・Glass metal probe: low outgassing, high stability, and small size that can be easily introduced into a vacuum chamber
・Vacuum cylindrical probe: Using vacuum-compatible materials and adhesives, heat diffusion from the probe is suppressed to virtually zero.
・Non-magnetic probe possible
・Multiple types of chamber feedthroughs available
A high-precision capacitive position sensor that can be used in high vacuum and ultra-high vacuum (UHV). Because it is vacuum compatible, it is made of materials that produce less outgassing. MicroSense has extensive experience in manufacturing vacuum-compatible sensors and can recommend the best solution for your application.
Our products have been successfully used in FIB (focused ion beam) systems, SEM (scanning electron microscopy) systems, lithography systems, and various large-scale physics experimental projects.
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Product
Capacitive displacement sensor Vacuum compatible high precision position sensor
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Handling Company
Japan Laser Co., Ltd.
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Categories
1 Models of Capacitive displacement sensor Vacuum compatible high precision position sensor
| Product Image | Part Number | Price (excluding tax) |
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High precision position sensor |
Available upon quote |
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About Company Handling This Product
- Japan