Product
Laser cleaner (laser cleaning machine) UV laser cleanerHandling Company
Kokyo Co., Ltd.Categories
Product Image | Part Number | Price (excluding tax) | External dimensions (chiller unit) | External dimensions (main body) | External dimensions (power supply unit) | Laser oscillation wavelength | Maximum irradiation area (for NA0.3 lens) | Maximum irradiation area (for f=430mm fθ lens) | Operating temperature | Repetition frequency | Spot diameter |
---|---|---|---|---|---|---|---|---|---|---|---|
Uvlc |
Available upon quote | W280 mm × H420 mm × D600 mm | W400mm × H650mm × D1,050mm | W200 mm × H450 mm × D600 mm | 355nm |
When the ultra-fine objective lens unit is attached 1.6 mm × 1.2 mm (for NA0.3 lens) |
When the ultra-fine objective lens unit is not installed 300 mm × 300 mm (for f=430mm fθ lens) |
15℃~30℃ | 20kHz ~ 200kHz |
0.48 μm (when using an objective lens with NA0.9) 1.4 μm (when using NA0.3 objective lens) |