P-620.2–P-629.2PIHera XY axis small piezo stage
PI Japan Co., Ltd.
About This Product
■Features
・Moving range 50-1,800μm
・Resolution up to 0.1nm
・Positioning accuracy 0.02%
・Direct position measurement using capacitive sensors
・X, XY, Z, XYZ version
■Application field
・Interferometer
・Microscopic examination
・Nano positioning
・Biotechnology
・Test procedures and quality assurance
・Photonics
・Fiber positioning
・Semiconductor technology
■Excellent lifespan with PICMA® piezo actuator
- All patented PICMA® piezo actuators are ceramic insulated. This protects against failure due to moisture and increased leakage current.
- PICMA® actuators offer up to 10 times longer lifespan than traditional polymer-insulated actuators.
- Proven to have never failed after 100 billion cycles.
■Sub-nanometer resolution using capacitive sensors
Capacitive sensors provide non-contact measurements with sub-nanometer resolution. They guarantee excellent linearity of operation, long-term stability, and bandwidth in the kHz range.
■High guide accuracy with zero-play deflection guide
- Deflection guides require no maintenance, no friction, no wear, and no lubrication required.
- Due to its high rigidity, it can withstand high loads and is insensitive to shock and vibration.
- Operates over a wide temperature range.
■Highest accuracy due to direct position measurement
The motion is measured directly on the motion platform without the influence of driving or guiding elements. This provides optimal reproducibility, excellent stability and robust, fast-responsive control.
*Other model numbers are available.
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Product
P-620.2–P-629.2PIHera XY axis small piezo stage
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Handling Company
PI Japan Co., Ltd.
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Categories
10 Models of P-620.2–P-629.2PIHera XY axis small piezo stage
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Active axis | Bidirectional repeatability in Y direction | Bidirectional reproducibility in X | Drive type | Electric capacity in Y direction | Electrical capacity of X | Guide | Integrated sensor | Linearity error of X | Movement range in Y direction | Movement range in the X direction | Pitch (rotational crosstalk in the θX direction due to movement in the Y direction) | Pitch (rotational crosstalk in the θY direction due to movement in the X direction) | Resolution in X direction, open loop | Resolution in Y direction, open loop | Resonance frequency in Y direction, under 100g load | Resonance frequency in Y direction, under 50g load | Resonant frequency in X direction, no load | Resonant frequency of X, under 100g load | Resonant frequency of X, under 50g load | Short-term maximum operating frequency | Stiffness in X direction | Stiffness in Y direction | System resolution in X | System resolution in Y | Travel range in X direction, open loop | Travel range in Y direction, open loop | Y linearity error | Yaw (rotational crosstalk in the θZ direction with movement in the X direction) | Yaw (rotational crosstalk in the θZ direction with movement in the Y direction) |
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P-620.20L |
Available upon quote | XY | - | - | Pikma® | 0.35μF | 0.35μF | Deflection guide with lever amplification function | - | - | - | - | ±3μrad | ±3μrad | 0.1nm | 0.1nm | 300Hz | 395Hz | 575Hz | 270Hz | 285Hz | 267Hz | 0.22N/μm | 0.22N/μm | - | - | 60μm | 60μm | - | ±3μrad | ±3μrad |
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P-620.2CD |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 0.35μF | 0.35μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 50μm | 50μm | ±3μrad | ±3μrad | 0.1nm | 0.1nm | 300Hz | 395Hz | 575Hz | 270Hz | 285Hz | 267Hz | 0.22N/μm | 0.22N/μm | 0.2nm | 0.2nm | 60μm | 60μm | 0.02% | ±3μrad | ±3μrad |
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P-620.2CL |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 0.35μF | 0.35μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 50μm | 50μm | ±3μrad | ±3μrad | 0.1nm | 0.1nm | 300Hz | 395Hz | 575Hz | 270Hz | 285Hz | 267Hz | 0.22N/μm | 0.22N/μm | 0.2nm | 0.2nm | 60μm | 60μm | 0.02% | ±3μrad | ±3μrad |
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P-621.20L |
Available upon quote | XY | - | - | Pikma® | 1.5μF | 1.5μF | Deflection guide with lever amplification function | - | - | - | - | ±3μrad | ±3μrad | 0.2nm | 0.2nm | 285Hz | 365Hz | 420Hz | 220Hz | 285Hz | 178Hz | 0.25N/μm | 0.25N/μm | - | - | 120μm | 120μm | - | ±3μrad | ±3μrad |
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P-621.2CD |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 1.5μF | 1.5μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 100μm | 100μm | ±3μrad | ±3μrad | 0.2nm | 0.2nm | 285Hz | 365Hz | 420Hz | 220Hz | 285Hz | 178Hz | 0.25N/μm | 0.25N/μm | 0.4nm | 0.4nm | 120μm | 120μm | 0.02% | ±3μrad | ±3μrad |
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P-621.2CL |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 1.5μF | 1.5μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 100μm | 100μm | ±3μrad | ±3μrad | 0.2nm | 0.2nm | 285Hz | 365Hz | 420Hz | 220Hz | 285Hz | 178Hz | 0.25N/μm | 0.25N/μm | 0.4nm | 0.4nm | 120μm | 120μm | 0.02% | ±3μrad | ±3μrad |
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P-622.20L |
Available upon quote | XY | - | - | Pikma® | 3.1μF | 3.1μF | Deflection guide with lever amplification function | - | - | - | - | ±3μrad | ±3μrad | 0.4nm | 0.4nm | 175Hz | 215Hz | 225Hz | 160Hz | 180Hz | 100Hz | 0.2N/μm | 0.2N/μm | - | - | 300μm | 300μm | - | ±3μrad | ±3μrad |
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P-622.2CD |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 3.1μF | 3.1μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 250μm | 250μm | ±3μrad | ±3μrad | 0.4nm | 0.4nm | 175Hz | 215Hz | 225Hz | 160Hz | 180Hz | 100Hz | 0.2N/μm | 0.2N/μm | 0.7nm | 0.7nm | 300μm | 300μm | 0.02% | ±3μrad | ±3μrad |
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P-622.2CL |
Available upon quote | XY | ±2nm | ±2nm | Pikma® | 3.1μF | 3.1μF | Deflection guide with lever amplification function | Capacitive direct position measurement | 0.02% | 250μm | 250μm | ±3μrad | ±3μrad | 0.4nm | 0.4nm | 175Hz | 215Hz | 225Hz | 160Hz | 180Hz | 100Hz | 0.2N/μm | 0.2N/μm | 0.7nm | 0.7nm | 300μm | 300μm | 0.02% | ±3μrad | ±3μrad |
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P-625.20L |
Available upon quote | XY | - | - | Pikma® | 6.2μF | 6.2μF | Deflection guide with lever amplification function | - | - | - | - | ±3μrad | ±3μrad | 0.5nm | 0.5nm | 125Hz | 150Hz | 135Hz | 105Hz | 120Hz | 65Hz | 0.1N/μm | 0.1N/μm | - | - | 600μm | 600μm | - | ±5μrad | ±5μrad |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan