Single electrode sensor with excellent position resolution D-510 PISeca capacitive sensor
PI Japan Co., Ltd.
About This Product
■Highest accuracy and longevity with capacitive position sensor
- When combined with signal processing electronics, resolution for quasi-static applications reaches the sub-nanometer range
- Bandwidth can be increased up to 10 kHz for high dynamics applications and still reach resolution in the 1 nm range
・Linearity error is less than 0.1%
■Customized version / 2 electrode sensor
In addition to the standard sensors listed here, PI offers a series of application-specific custom versions, where e.g. measuring range, shape and material are adapted to customer requirements.
・Customized electronic devices are also available
-D-100 series 2-electrode sensors meet the highest demands on linearity and resolution
■Easy to handle and integrate
- All PISeca sensor heads are equipped with LEMO connectors for easy installation and replacement
Uniform shaft thickness ensures compatibility and flexibility
- There are several variations of the cable that connects to the evaluation electronics and must be ordered separately.
■Application field
・Industry and research
・Semiconductor manufacturing and inspection
・Nanometrology
・Active vibration absorption device
・Precision processing
■Features
・Non-contact distance measurement
・Absolute position detection
・Vibration measurement
・Subnanometer resolution
・Flexible measurement range
・Easy integration
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Product
Single electrode sensor with excellent position resolution D-510 PISeca capacitive sensor
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Handling Company
PI Japan Co., Ltd.
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Categories
3 Models of Single electrode sensor with excellent position resolution D-510 PISeca capacitive sensor
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Dynamic resolution | Largest measurement gap with 5x expanded measurement range* | Linearity error | Mass | Material | Minimum measurement gap in the nominal measurement range | Mounting shaft diameter | Nominal measurement range | Operating temperature range | Recommended electronic equipment | Sensor active area | Sensor area | Sensor diameter | Sensor effective diameter | Sensor type | Static resolution | Suitable connection cable |
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D-510.021 |
Available upon quote |
<0.002% of measurement range (RMS) *Bandwidth 10 kHz, using E-852 rated electronic equipment |
150μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
<0.2% *Linearity error in the nominal measurement range |
8g (±5%) | stainless steel |
10μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
8mm |
20μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
-20~100℃ | E-852.10, E-852.10A1, E-711.SE3, E-509, E-509.E03, E-509.E3 | 11.2mm² | 50.3mm² | 8mm | 3.8mm | Single electrode, capacitive |
<0.001% of measurement range (RMS) *Bandwidth 10 Hz, using E-852 evaluation electronic equipment |
D-891.01x, D-891.02x |
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D-510.051 |
Available upon quote |
<0.002% of measurement range (RMS) *Bandwidth 10 kHz, using E-852 rated electronic equipment |
375μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
<0.1% *Linearity error in the nominal measurement range |
10g (±5%) | stainless steel |
25μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
8mm |
50μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
-20~100℃ | E-852.10, E-852.10A1, E-711.SE3, E-509.E03, E-509.E3 | 27.9mm² | 113.1 mm² | 12mm | 6mm | Single electrode, capacitive |
<0.001% of measurement range (RMS) *Bandwidth 10 Hz, using E-852 evaluation electronic equipment |
D-891.01x, D-891.02x |
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D-510.101 |
Available upon quote |
<0.002% of measurement range (RMS) *Bandwidth 10 kHz, using E-852 rated electronic equipment |
750μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
<0.1% *Linearity error in the nominal measurement range |
16g (±5%) | stainless steel |
50μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
8mm |
100μm *Extended measurement range is available for E-852.10, and each of the two measurement ranges is calibrated. Expansion factor: 1, 2, 2.5, 5. |
-20~100℃ | E-852.10, E-852.10A1, E-711.SE3, E-509, E-509.E03, E-509.E3 | 56.1 mm² | 314.0 mm² | 20mm | 8.4mm | Single electrode, capacitive |
<0.001% of measurement range (RMS) *Bandwidth 10 Hz, using E-852 evaluation electronic equipment |
D-891.01x, D-891.02x |
Click on the part number for more information about each product
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