This product is registered by Oki Riko Jizai Co., Ltd..
About This Product
■Summary
OPTM is a device that enables highly accurate film thickness and optical constant analysis by measuring absolute reflectance in a minute area using microscopic spectroscopy. The thickness of coating films and multilayer films on various films, wafers, optical materials, etc. can be measured non-destructively and non-contact. High-speed measurement is possible with a measurement time of 1 second/point. It is also equipped with software that allows even first-time users to easily analyze optical constants.
■Features
・Functions necessary for film thickness measurement are integrated into the head.
・Highly accurate absolute reflectance measurement using microscopic spectroscopy (multilayer film thickness, optical constants)
・High-speed measurement within 1 second per point
・Optical system that realizes a wide measurement wavelength range under a microscope (ultraviolet to near infrared)
・Safety mechanism using area sensor
・Easy analysis wizard that allows even beginners to analyze optical constants
・Equipped with a macro function that allows you to customize measurement sequences
・Complex optical constants can also be analyzed (multiple point analysis method)
・300mm stage compatible
・Supports various customizations
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