SCO-c LED indication for identification in 1 to 5 seconds. We focused on high speed and easy operation.
■Easy operation
Place the Si wafer (notch) on the table and press the measurement start button.
■High-speed 1-5 seconds measurement
(1.0.0) then LED lights up
■ Compatible with both edges and faces
Set vertically for notch orientation measurement, and flat for surface orientation measurement.
■Maximum Φ300mm compatible
Measurement target Si wafer Φ200mm Φ300mm
■ Safety double X-ray shielding structure
Direct X-ray shutter and scattered X-ray shielding case/interlock leakage X-ray prevention
■Specifications
・X-ray tube Cu output 30kV1mA Detector/meter X-ray intensity) Discrimination LED display
・Sample stand: flat table (surface detection) and vertical installation allowance: diagonal installation method
・Housing (X-ray shielding steel plate) Power supply: AC100V (250W) 50/60Hz Grounding (grounding resistance 100Ω or less)
・Usage environment: Ambient temperature 35℃ or less Humidity 60% or less
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