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Voltage voltage MAX.3KV Power voltage 6kV (1 minute. It is a high -voltage connector used in the electrostatic chuck. It is used for power supply to the electrostatic chuck of the semiconductor manufacturing device. It is a powered terminal for applying a high voltage to the work.
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See all 6 models in listPart Number
Electrostatic chuck power supply terminalHandling Company
Hisawa GikenItems marked with have different values depending on the model number.
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